Pilot Wastewater
Reuse Plant Sets a Standard for Improving Water Efficiency in New
Wafer Fabrication Facilities
Ajay Shah, ON Semiconductor
Abstract:
Water efficiency in many industrial operations has become a necessity.
The rising usage and cost of sewer and water tend to contribute
a significant portion of the total utility cost. Many semiconductor
manufacturing operations, power plants and other water intense
industrial units are trying to improve their financial bottom line
by conserving this natural resource through wastewater reuse and/or
recycle programs. This presentation details one such effort in
a pilot project. The pilot plant selectively captured minimally
contaminated waste streams, requiring very limited treatment and
control, for reuse in its manufacturing operations.
Wastewater characterizations is one of the critical parts of any
reliable and successful reuse or recycle program. This presentation
reviews the concept and the results of the wastewater characterization
study. It examines the point of wastewater origin to categorize
the type and amount of process chemicals used. It identifies the
parameters of concern and achieves a representative composition
of the influent stream. The results of the study lead to the implementation
of a pilot wastewater reuse system involving segregation, capture
and reuse of the sparingly contaminated waste streams. This presentation
shows the analytical results of this pilot reuse system, its immediate
return-on-investment (ROI), and how it became a technical standard
for all future new construction projects.
Biography:
Ajay R. Shah is a Senior Principal Staff
Engineer in the corporate Environmental, Health and Safety organization
of ON Semiconductor, based in Phoenix, Arizona. He is responsible
for EHS Technical, Engineering support and Project Management for
ON Semiconductor. He earned an undergraduate degree in Chemical
Engineering from India and a Master's degree in Instrumental Sciences
from the University of Arkansas, Little Rock, Arkansas. He has
been in the various engineering, supervisory and managerial roles
in the EHS, water and wastewater arenas in the electronics industry
for past 19 years.
His effort in water conservation was rewarded with a the U.S.
Bureau of Reclamation's Water Conservation award in recognition
of the company's successful implementation of the pilot wastewater
reuse system in January 2000.
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